Summary
The main focus will be on development of different plasma sources and methods. Technical principles of plasma systems and examples of their applications will be highlighted.
Topics
- Fundamentals of plasma processing at reduced gas pressure
- Radio frequency plasma sources, capacitively and inductively coupled plasmas
- Microwave plasmas, ECR plasma, surfatron and surfaguide arrangements
- Decaying plasmas and afterglows
- Pulsed plasma
- Hollow cathode plasma sources
- Linear magnetized hollow cathodes
- Hybrid plasma systems
Instructors
Hana Barankova
Professor, Uppsala University, Sweden
Ladislav Bardos
Professor, Uppsala University, Sweden
