Summary
In this module, some essential features of plasmas will be refreshed and/or introduced to the attendee. In this way, the module prepares the attendee to study plasmas as used in plasma-assisted deposition methods. Further the concepts will be used in other modules in the trajectories.
Topics
- Plasma: Definition, basic parameters and properties, Coulomb interaction and Debye shielding, plasma oscillations, magnetization of electrons, charge particle transport incl. drifts in the single-particle description, Maxwell equations
- Discharges to Produce Plasmas: elastic and inelastic collisions, distribution functions, cross sections, ionization, charge transfer, elements of plasma chemistry, DC and pulsed discharges
- Discharges with Magnetic and Electrostatic Electron Trapping: magnetron and hollow cathode discharges
- Sheath: the plasma boundary, space charge and the plasma potential vs. surface potential, Child-Langmuir law
- Sheath and Biasing, Ion Acceleration: effects of ions on surfaces, densification, secondary electron emission, sputtered atoms
- Electrode Phenomena: secondary electrons, thermionic emission, thermo-field emission, explosive emission, emission to define glows and arcs, modes of arcs, arcing
- Plasma in Magnetrons: DC, balanced vs unbalanced, pulsed, HiPIMS, self-sputtering, gas recycling, gas vs. metal ions
- Plasma instabilities, the example of spokes, effects of reactive gases
- Positive and negative ions in deposition-related plasmas
Instructor
André Anders
Plasma Engineering, LLC
Editor-in-Chief, Journal of Applied Physics, AIP Publishing Melville, NY
