Manuscript Deadline: July 15, 2025
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Control of Micro- and Nanostructure Evolution during Physical Vapor Deposition – 5/23/23

Tuesday, May 23, 8:30 a.m.-12:30 p.m.

Course Description

Control of Microstructure Evolution during Sputter-Deposition

  • Film growth processes—nucleation, coalescence, competitive grain growth, recrystallization
  • Zone diagrams
  • Epitaxial growth
  • Effects of reactive species

Use of Low-energy Ion Bombardment to Control Microstructure during Low Temperature Film Growth

  • Effects of sputtered atoms energy
  • Effects of gas ion energy
  • Use of high fluxes of low-energy gas ions
  • Metal-ion assisted growth – dense, stress-free films
  • Use of synchronized bias in HIPIMS
  • Kinetic roughing and surface facet formation
  • Texture inheritance
  • Metal-ion etch and adhesion control

Self-organized Nanostructure Formation

  • Thermal segregation and renucleation – random nanocomposites
  • Ion-assisted segregation – highly-oriented nanocomposites; equiaxed to columnar transition
  • Resputter-yield amplification: HfAlN
  • Self-organized 3D superlattices via vacancy ordering
  • SiOx Nanowires by ion-enhanced vapor-liquid-solid (VLS) growth

Who Should Attend?

Graduate students, scientists and engineers who want to learn about control of microstructure during physical vapor deposition.

Instructor

Ivan Petrov

PhD, D.h.c., Professor
Materials Research Laboratory, Univ. of Illinois at Urbana-Champaign, USA
Department of Physics, Linköping University, Sweden

Advance Registration Recommended!

Cost Per Track: $300
Cost Per Module: $100

Module(s) Include: Link to Course Notes (PDF)

You may select any combination of modules during the registration process

REGISTER

Key Dates

Call for Abstracts Deadline:
November 15, 2024

Awards Nomination Deadline:
November 15, 2024

Author Notifications:
December 18, 2024

Early Registration Deadline:
March 25, 2025

Housing Deadline:
April 17, 2025

Manuscript Deadline:
July 15, 2025

Downloads

  • Code of Conduct (PDF)
  • Call for Abstracts (PDF)
  • Copyright Agreement (PDF)
  • Exhibit & Sponsor Form (PDF)

Contact

ICMCTF
Yvonne Towse

Conference Administrator
125 Maiden Lane; Suite 15B
New York, NY 10038
icmctf@icmctf.org

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